Relationships between Diffusion Parameters and Phosphorus Precipitation during the POCl3 Diffusion Process
نویسندگان
چکیده
منابع مشابه
Relationships between diffusion parameters and phosphorus precipitation during the POCl3 diffusion process
The POCl3 diffusion process is still a common way to create the pn-junction of Si solar cells. Concerning the screenprinting process, it is necessary to find a compromise between low emitter recombination, low contact resistance and high lateral conductivity. The formation of a homogeneous emitter during the POCl3 diffusion process depends on several diffusion parameters, including duration, te...
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The influence of a SiNx coating of a Si wafer on sheet resistance (RSh) of a neighbouring wafer during POCl3 diffusion process is investigated. Wafers facing the SiNx layer of the neighboring wafer in the next slot of the quartz boat show a lower RSh compared to those facing a bare Si wafer, e.g. a reduction from 61 Ω/sq to 52 Ω/sq and a thicker PSG layer are determined. The active doping profi...
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ژورنال
عنوان ژورنال: Energy Procedia
سال: 2013
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2013.07.275